JPH0526754Y2 - - Google Patents

Info

Publication number
JPH0526754Y2
JPH0526754Y2 JP1985139606U JP13960685U JPH0526754Y2 JP H0526754 Y2 JPH0526754 Y2 JP H0526754Y2 JP 1985139606 U JP1985139606 U JP 1985139606U JP 13960685 U JP13960685 U JP 13960685U JP H0526754 Y2 JPH0526754 Y2 JP H0526754Y2
Authority
JP
Japan
Prior art keywords
wafer
heat treatment
arm
vertically moving
treatment plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985139606U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6247133U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985139606U priority Critical patent/JPH0526754Y2/ja
Publication of JPS6247133U publication Critical patent/JPS6247133U/ja
Application granted granted Critical
Publication of JPH0526754Y2 publication Critical patent/JPH0526754Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Reciprocating Conveyors (AREA)
JP1985139606U 1985-09-12 1985-09-12 Expired - Lifetime JPH0526754Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985139606U JPH0526754Y2 (en]) 1985-09-12 1985-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985139606U JPH0526754Y2 (en]) 1985-09-12 1985-09-12

Publications (2)

Publication Number Publication Date
JPS6247133U JPS6247133U (en]) 1987-03-23
JPH0526754Y2 true JPH0526754Y2 (en]) 1993-07-07

Family

ID=31045669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985139606U Expired - Lifetime JPH0526754Y2 (en]) 1985-09-12 1985-09-12

Country Status (1)

Country Link
JP (1) JPH0526754Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118125A (ja) * 1982-01-05 1983-07-14 Tatsumo Kk 基板の搬送装置

Also Published As

Publication number Publication date
JPS6247133U (en]) 1987-03-23

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